SECS/GEM
Equipment–host communication to SEMI standards. A development kit, equipment-side transmitter tools and a host-side acquisition driver for fab MES or EAP integration.
What it does
SECS/GEM is the international family of standard communication protocols that provides data collection and remote control between semiconductor manufacturing equipment and higher-level fab systems such as MES and EAP.
On the equipment side, events, alarms, recipes and status information are converted into standard messages; on the host side these messages are collected and SECS commands are routed to the equipment.
What sets this layer apart from other IPCONIQ products is that it has no operator interface: SECS/GEM is a protocol layer. Installed on the host side together with IPCONIQ Connect, it passes the collected data on to the monitoring and archive layers.
The platform manufacturer is a member of SEMI (Semiconductor Equipment and Materials International).
Products
Development kit
Development kit for the SECS/GEM standard communication interface. It covers parameter configuration, validation and simulation for GEM scenarios, helping you develop the interface quickly on the equipment or host side.
Equipment side · 8-inch wafer
Equipment-side SECS/GEM protocol interface routing tool. It transfers data from the data platform to EAP or MES, meeting the need for rapid interface development on 8-inch wafer manufacturing equipment.
Equipment side · 12-inch wafer
Equipment-side SECS/GEM protocol interface routing tool. It transfers data from the data platform to EAP or MES, meeting the need for rapid interface development on 12-inch wafer manufacturing equipment.
Host side · Acquisition driver
Host-side SECS/GEM standard protocol communication driver. Installed together with IPCONIQ Connect, it collects semiconductor equipment data and routes SECS commands.
Standards
| Standard | Scope |
|---|---|
| SEMI E4 (SECS-I) | Equipment communication over a serial interface |
| SEMI E5 (SECS-II) | Message content structure and data items |
| SEMI E30 (GEM) | Generic equipment model and scenario management |
| SEMI E37 (HSMS) | High-speed messaging over TCP/IP |
| SEMI E40 (PJM) | Process job management |
| SEMI E84 | Hardware handshake protocol for transport systems |
| SEMI E87 (CMS) | Cassette/carrier management |
| SEMI E90 (STS) | Substrate tracking |
| SEMI E94 (CJM) | Control job management |
Platform family
Share your tag count, architecture and field protocols, and we will prepare a license configuration and price quote.
IPCONIQ is a trademark of ICC Dijital. Product descriptions and technical data are based on the manufacturer's official documentation. Specifications are subject to change without notice; binding values are stated in the project-specific quotation.
